Configurations:

1. Wet Bench No. 1:Etching

Main Body Material & Processing:

· Frame & Panel: SUS304, PP White (SIMONA)

· Shell:White, Antistatic, Flame retardant PPS (SIMONA)

· Pivoting wheels + Levelers SUS

 

Electrical Control Unit:

·Control: PLC system + IPC, Network communication module, Communication port, Expansion module, Communication cable (OMRON)

·Touch screen/computer + program (OMRON)

·Nitrogen level sensor (SMC)

·Three colors alarm light

·Electrical universal socket on front (with protective cover on socket)

·Other electrical components (Schneider Electric)

 

i. KOH/TMAH Silicon Etch Process Tank

·Tank Material: Quartz+5mm (Pacific)

·Heating system: Inline heating with temperature sensor &control

·Mega sonic system

ii. Metal Etch Process Tank:

·Tank Material: Quartz+5mm (Pacific)

·Heating system: Inline heating with temperature sensor &control

·Mega sonic system

 

iii. Oxide/Nitride Etch Process Tank:

·Tank Material:Quartz+5mm (Pacific)

·Heating system: Inline heating with temperature sensor &control

·Ultrasonic system

 

 

iv. QDR Tank:

·Material:PVDF+10mm (SIMONA)

·Multiple DI water inlets: DN40 PP (SANKING), CL-PVC+PFA (DEYING)

·Quick drains with cycles control: PFA (DEYING)

·Pressure switches and flow meters control (KEYENCE)

·Recirculation with filtration: PTFE Circulation pump (HJS), PVDF Magnetic pump (IWAKI), PFA filtration (Deefine)

 

v. Drying Tank:

·Material: SUS316L (TISCO)

·Heating system: SUS Inline heating with temperature sensor &control

·2x Spray nozzles in PFA material

 

vi. Working area:

·Material: PVDF (SIMONA)

·Perforated sink type stage with tank beneath and drain

·1×Dl goose neck tap

·2×DI spray gun

·2×N2 spray gun