| Реагент | Bar | CDU,
L/min |
L/min | Connection from CDU/between VMB
CDUVMB |
Connection from VMB to tool
VMB |
| H2SO4 96%, SLSI, M=1ppb | 2-3 | 40 | 20 | FluoroLine® Plus Dual Containment Tubing
Inner tube: 40 mm Outer tube: 50,84 mm |
FluoroLine® Plus Dual Containment Tubing
Inner tube : 25,4 mm Outer tube: 34,93 mm |
| TMAH 2,38%, XLSI, M=0,1ppb | 2-3 | 40 | 20 | ||
| TMAH 25%, XLSI, M=0,1ppb | 2-3 | 40 | 20 | ||
| H2O2 30%, XLSI, M=0,1ppb | 2-3 | 40 | 20 | ||
| NH4OH XLSI, M=0,1ppb | 2-3 | 40 | 20 | ||
| – Each valve cabinet must include:
– Valves, pressure regulators and fittings ， – Automatic shut-off valve (normally closed) on each reagent supply line to the consumer – Manifold drain valve (for drainage and flushing of pipelines) – Drain valve on each reagent supply line to the consumer (for drainage and flushing of pipelines) – Leakage control system – Drain valve in the housing to remove possible reagent spillage – Light signaling of receiving the “Alarm” signal or when a leak is detected – Automatic shut-off of supply when a leak is detected inside the cabinet, as well as upon a signal from the emergency protection system. – Reagents must not come into contact with metals – The dimensions of the cabinet must be minimal. |
|||||
| Position | Chemical | Outlets | VMB quantity, pc. |
| VMB-C1-2 | H2SO4 | 2 | 1 |
| VMB-C1-3 | H2SO4 | 3 | 2 |
| VMB-C2-2 | H2O2 | 2 | 1 |
| VMB-C2-3 | H2O2 | 3 | 1 |
| VMB-C2-5 | H2O2 | 5 | 1 |
| VMB-C3-3 | TMAH(1) | 3 | 1 |
| VMB-C3-5 | TMAH(1) | 5 | 1 |
| VMB-C4-2 | TMAH(2) | 2 | 1 |
| VMB-C4-3 | TMAH(2) | 3 | 2 |
| VMB-C5-3 | NH4OH | 3 | 1 |
| VMB-C5-5 | NH4OH | 5 | 2 |