| Product Introduction of Vertical Furnace Tube Cleaning Machine
product overview The vertical furnace tube cleaning machine is a precision cleaning equipment designed specifically for semiconductor, photovoltaic, materials laboratory and other fields. It is used to efficiently remove deposits (such as oxide layer, polycrystalline silicon, metal residue, etc.) in the cavities of vertical furnace tubes, quartz tubes, silicon carbide tubes, etc., ensuring process repeatability and equipment life. |
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Core Features
Efficient cleaning technology
Adopting dry (high-temperature pyrolysis) or wet (chemical solution) cleaning processes to adapt to different types of pollution.
Optional plasma cleaning function for stubborn organic residue.
Fully automated control
Integrated PLC or touch screen control system, preset multiple cleaning programs, supports one click adjustment of parameters (temperature, time, gas flow).
Equipped with safety interlock devices, real-time monitoring of pressure and temperature, and abnormal alarms.
Compatibility and Scalability
Suitable for various pipe diameters (such as Φ 100mm~300mm) and lengths (≤ 2000mm), supporting customized design.
Modular structure, upgradable exhaust gas treatment system (such as SCRUBBER) to meet environmental requirements.
Low consumables and environmental protection
Optimize the dosage of chemical reagents and reduce operating costs; After treatment, the exhaust gas meets the emission standards.
Typical applications
Semiconductor manufacturing: Regular maintenance of diffusion furnaces and LPCVD furnace tubes.
Photovoltaic industry: Cleaning of tubular PECVD in PERC and TOPCon cell processes.
Research field: Cleaning of new material synthesis furnace tubes and quartz devices.
Example of Technical Parameters
Project parameter range
Cleaning pipe diameter ranging from 50mm to 400mm (customizable)
Maximum temperature 200 ℃~1200 ℃ (optional according to process)
Gas systems N ₂, O ₂, Ar, CF4, etc. are optional
Power supply 220V/380V, 50/60Hz
Equipment size customized according to model (usually ≤ 2m ³)
Customer Value
Improve yield: reduce cross contamination and ensure process stability.
Reduce costs: Extend the service life of furnace tubes and reduce downtime.
Safe and reliable: Complies with international standards such as SEMI and CE.