E-mail: vicent.xia@wafera.com

Parts Cleaning Machine

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1.1 Equipment Overview

The main function is to clean the components, and this equipment has a good cleaning process;

Basic parameter table of equipment

Equipment name Fully automatic cleaning machine
Equipment number NTYJ-QZDQX24-03
quantity 1 unit
Equipment size 6400mm(L)×2700mm(W)×2200mm(H)
Cleaning product size L700mm*W700mm*H200mm
Loading and unloading materials hand movement
process control PLC control
TOUCH SCREEN CONTROLLER
Liquid inlet control Manual liquid preparation
DIRECTION Machine direction Forward, forward, out
Mechanical arm bearing Capacity Max.50Kg/time
Quantity of workpieces Single basket/time
Dual protection for dry burning hardware and software not have
Liquid level protection function have
Temperature protection function not have
Leakage detection function have
Time setting 0-12 hours can be set (depending on the actual process time)
Capacity design Two shift system (note: working 24H/day, 360 days/year)
 

Equipment stability

UPTIME: UPTIME ≥ 98% (1- (fault time+PM time)/total time)
MTTR: MTTR ≤ 4h (MTTR=total repair time/total number of failures)
MTBE: MTBE ≥ 450h (MTBF=total operating time/total number of failures)
Equipment operating temperature range 20-25°C
relative humidity <70%

1.2 Equipment Features

standard The design, selection, manufacturing, inspection, and testing of this equipment are carried out in accordance with relevant national and semiconductor industry standards (SEMI-S2-93), standardized and guaranteed by the ISO9001 quality management system, except as otherwise specified in the contract or technical documents. The purchased accessories shall comply with the corresponding national standards, industry standards, specifications, and enterprise standards
The equipment includes Equipment body, electrical control part, chemical process tank, etc; And provide interfaces that are compatible with the factory’s power supply, gas supply, water supply, wastewater discharge, exhaust system, etc
main body The main body of the equipment is made of domestic porcelain white 10mm PP board, which is sturdy and durable, with double-layer leak proof,
Skeleton SUS304+PP domestic porcelain whiteboard combination to prevent rusting of the shell
safety door Install transparent PVC doors that move left and right to separate and protect personnel safety,
Process tank Modular design, with the corrosion tank and pure water flushing tank placed in a unified leak proof chassis. The chassis is processed using full welding technology to eliminate the risk of machine leakage
pipe system Located at the bottom of the equipment, all process tanks, pipelines, and valve parts are clearly labeled; PFA pipes are used for the liquid medicine pipeline, PFA pipes are used for the pure water pipeline, and the chemical corrosion tank waste liquid and flushing wastewater are discharged through dedicated pipelines
electrical protection The electrical control, gas path control, and process tank control sections are located in a separate electrical control area at the rear of the equipment. The electrical components are adequately protected against acid mist corrosion to ensure stable and reliable equipment performance and operation;
Machine support legs There are pulley devices and fixing devices with anti-corrosion seats, and they have height adjustment and locking functions
security guarantee Complete alarm and protection design, hardware or software interlocking for exhaust pressure, liquid level, and drainage, intuitive operation interface, clear information prompts, ensuring production, process control, and safety. The three color warning light is placed prominently above the machine

2. Process flow and process details

2.1 Process flow:

1 # Pickling -2 # Pickling -3 # Neutralization -4 # Cleaning

2.2 Outline structure diagram: refer to the drawing;

2.3 The table layout is as follows

 

2.4 Process parameters for each slot:

production processes Auxiliary functions Time (S) Temperature (℃) material Slot cover heater convulsions
1 acid pickling Soak and bubble 0-9999 RT NPP have not have have
2 acid pickling Soak and bubble 0-9999 RT NPP have not have have
3 neutralization soak 0-9999 RT NPP have not have have
4 QDR Water inlet spray

Overflow bubbling

tympanic bulla

0-9999 RT NPP not have not have have

2.5 Pickling tank (1 # 2 #)

medium acid liquor
Work energy Soak and bubble
Tank material Imported NPP from Germany
Tank size L800mm*W800mm*H400mm
Usage temperature RT
Liquid inlet method Manual liquid inlet
water feeding pattern Automatic water intake
Bubble method The PFA tube at the bottom of the tank is evenly bubbling
Liquid level method Connecting pipe liquid level
Drainage method Automatic pump discharges into the recycling bin
Slot cover method Manual NPP slot cover

2.6 Neutralization tank (3 #)

medium lye
Work energy Soak and neutralize
Tank material Imported NPP from Germany
Tank size L800mm*W800mm*H400mm
Usage temperature RT
Liquid inlet method Manual liquid inlet
water feeding pattern Automatic water intake
Liquid level method Connecting pipe liquid level
Drainage method Automatic pump discharges into the recycling bin
Slot cover method Manual NPP slot cover

2.7 QDR slot

medium DIW
Work energy Spray water injection overflow bubble quick discharge
Tank material Imported 10mm NPP board from Germany
Tank size L800mm*W800mm*H400mm
Usage temperature RT
Bubble method PFA pipes are evenly distributed at the bottom, and the upper part of the bubble tube is equipped with a perforated plate
Spray method Spray pipes are distributed on both sides of the upper part of the tank, with adjustable pressure and angle
Liquid inlet method Automatic water inlet spray water injection time ≤ 10s
Drainage method Fast emission time ≤ 5s
 

technological process

Step 1: Spray open the quick release and open it simultaneously

Step 2: Inject water, turn on the spray, turn on the bubble, turn on the bubble

Step 3: After the water is full, overflow and open to soak

The time for the above steps is in seconds and can be set. The batch can also be set

 

 

 

Tank body diagram

                

3. Electrical components

3.1 Electrical box section

Electrical box section Equipped with an independent power distribution area,
The equipment is equipped with a ventilation system to ensure air circulation inside the electrical box and has good heat dissipation function
All electrical control systems are equipped with leakage protectors, reliable grounding devices, and emergency shutdown and alarm systems;

3.2 Control section

controller The equipment is divided into automatic and manual parts during use. No other operations can be performed during automatic operation. In case of any problems, please press the emergency stop device. When the emergency stop is pressed, all work will be suspended. It is strictly prohibited to perform manual operations during automatic operation;
Human computer interface: adopting professional and advanced graphical user interface, easy to operate and master, capable of completing trajectory editing and modification according to needs.
Basic functions: password verification login, security protection door protection, alarm and other security functions, storage functions such as process prescription, operation and maintenance records, etc
Tank control: Each tank has a corresponding separate control panel on the upper part of the front plate. The liquid tank has separate function buttons for temperature display, liquid level display, and status display. The QDR tank has separate start/stop buttons for each tank, as well as separate buttons for spraying, water inlet, bubbling, drainage, and other means;
Warning light, buzzer, emergency stop
Touch screen function: There is a manual operation button for the device, and real-time monitoring of the equipment is completed according to the pipeline diagram setting screen. Various functions of each tank are monitored, including temperature, liquid level, tank cover status, mechanical arm in place status, pump and valve start and stop, alarm display, and alarm recording.
Interface settings: various parameter settings, interfaces for management personnel, process personnel, operators, etc.
All chemical tanks are equipped with capacitive level sensors to prevent pump idling. Capacitive level gauges are added to the heating tanks to prevent dry burning of the heaters;
The robotic arm automatically returns to the origin within a fixed time, eliminating mechanical and electrical errors;
Equipment power-off protection function, protecting against program failures caused by unexpected power outages;
The equipment has an automatic alarm information recording system

4. Robot arm system

4.1 Lateral translation of robotic arm

1 electrical machinery servo motor
2 power 750W+reducer+brake
3 SPEED CONTROL Stable start of translation, acceleration translation, deceleration stop
4 linear guide rail Linear bearing guide rail
5 Rack and pinion customized
 

 

6

 

 

Walking pictures

                                      

4.2 Mechanical arm up and down hooking

1 electrical machinery servo motor
2 power 750W+reducer+brake
3 SPEED CONTROL Stable start of translation, acceleration translation, deceleration stop
4 linear guide rail Linear bearing guide rail
5 Ball screw Upper Silver Linear Precision Guidance Mechanism
6 load 50Kg
 

 

 

7

 

 

 

gripper mechanism

                                        

5. Equipment utility engineering conditions

5.1 Electric Power Conditions

voltage 380V
frequency 50Hz
Number of phases Three-phase five-wire system
power 8KW
loop DC24V

5.2 Gas dynamic conditions of liquid medicine

medium temperature material Pressure kgf/cm2 nature caliber Connection method
liquid
pure water RT PFA 2.5-3 ≥ 18 MB 3/4*6 Direct insertion
gas
CDA RT PU tube 5-6 no oil Φ10*2 Direct insertion
N2 RT PU tube 4-5 Purity ≥ 99.99% Φ10*3 Direct insertion
emission
waste water RT PP DN32*1 slipknot
Exhaust emissions
gas RT PP Φ200*2 flange

6. List of Main Materials for Equipment

Serial Number name quantity Specification and model Supplier manufacturer
1 skeleton 1 50 * 50 (3mm thick) domestic
2 casing 1 Porcelain white PP10mm domestic
3 Transparent observation doors and windows 2 5mm South Asia
4 Foot accessories 4 M22 domestic
5 temperature sensor 1 E5CZ Omron Japan
6 Liquid level sensor 3 Omron Japan
7 solenoid valve 3 2-position 3-way/straight through SMC
8 Pipelines and valves 10 DN25/DN40 PP/PFA GF/CKD
9 PLC controlling sYstem 1 Wistron
10 Touch Screen 1 7” Wistron
11 Air switch, contactor 6 schneider
12 temperature control 6 Omron
13 relay 5 schneider

 

7. Manufacturing cycle

50 working days after the prepayment of the effective subject matter of the contract is received;

We guarantee that we will not outsource the production and processing of all equipment for your company;

8. Equipment delivery inspection and transportation

8.1 Acceptance standards and acceptance criteria

Table 7-1 Acceptance Specifications

Serial Number project subject to check and delivery Testing parameters or requirements test method notes
1 appearance Clean surface and clear labeling visualization
2 External dimensions According to the contract requirements taping
3 Tank size According to the contract requirements taping
4 maximum temperature According to the contract requirements Using a thermometer for measurement
5 minimum temperature According to the contract requirements Using a thermometer for measurement
6 precision According to the contract requirements Using a thermometer for measurement
7 control mode visualization visualization
8 power supply Embedded flow table
9 power Embedded flow table
10 Security testing 1500V communication, no breakdown for 1 minute According to GB4793.1-1999

Test according to the voltage withstand tester

 

pressure resistance

After stabilizing at 500V DC for 10 seconds, the insulation resistance value should be above 2M ohms Insulation resistance tester testing

Table 8-2 Acceptance Criteria

Serial Number Testing items describe
1 appearance The product shell has no obvious deformation, cracks, bending or other serious damage, and the fastening parts are not loose, firm and reliable. If one of them is unqualified, it is allowed not to be accepted
2 performance index Meet design and specification requirements
3 other Execute according to the contents listed in this Technical Agreement

9. Equipment installation and debugging

9.1 Installation, Installation, and Debugging

After the equipment is inspected and approved by Party B and notified to Party A, the responsibilities of each party are defined as follows

Job Responsibilities of Party B

Equipment unboxing;

Install the equipment in place according to the requirements of the factory layout plan;

Assembly and installation of equipment;

Under the guarantee conditions provided by Party A, Party B shall complete the installation according to the schedule and ensure the quality;

Equipment debugging and acceptance work

The first party is responsible for the following tasks

Place the power supply and standard air source in the installation position of the equipment and connect them;

The second party shall provide necessary assistance to the first party during the installation, debugging, and acceptance process

Complete positioning of the machine within 24 hours upon arrival; Complete secondary configuration within one week

9.2 Equipment acceptance

According to the quality assurance system, this acceptance standard is specially formulated as the basis for inspecting and accepting the equipment (including all contents of the contract) undertaken by Party B.

Design control: Based on the production outline proposed by Party A, Party B shall make reasonable designs in accordance with industry standards, and continuously optimize the scheme design during the communication process with Party A. For the structure of the equipment’s wiring, transmission, power, temperature control and other parts, a margin must be left in the selection to ensure long-term safe, reliable and stable operation, providing the most basic conditions for Party A to ensure product quality.

Manufacturing process control: The process of manufacturing equipment by Party B shall undergo strict inspection and experimentation, and any non-conforming products shall not proceed to the next process.

Inspection and acceptance: During the equipment manufacturing process and after the formation of finished components, strict inspection and testing must be carried out, and unqualified products are not allowed to enter the next process;

Handling, storage, packaging, protection, and delivery: Party B shall take measures to ensure product quality, and this protection shall continue until the delivery destination is installed, debugged, and delivered to Party A for use;

Installation and commissioning: Party B shall install and commission the equipment in accordance with industry regulations. Under the guarantee conditions provided by Party A, Party B shall complete the installation and commissioning work according to the schedule to ensure quality.

Personnel training: During the trial production process, Party B is responsible for providing training to Party A’s engineering and technical personnel on production line operation, maintenance, upkeep, and repair, as well as providing standardized training materials, circuit diagrams, and a complete list of spare parts.

9.3 Final acceptance

Acceptance of the appearance of the system: This equipment is a brand new and complete production device, as indicated in the signed specification sheet.

Equipment stability acceptance: Uptime ≥ 98%.

The equipment has been confirmed to meet production requirements and has been running continuously for 3 months. During this period, the equipment has no abnormalities and meets the technical specifications. The acceptance process will be followed.

10. Service Guarantee

10.1 Equipment Quality Assurance

The second party guarantees the equipment for one year after the start of debugging. Kunshan Xinruiwei Company is responsible for on-site installation of the system and provides free technical support and services for one year from the date of acceptance;

The second party guarantees that the quality, specifications, brand, and place of origin of all materials and components shall comply with the contract

The process layout, equipment arrangement, general assembly drawing, and technical documents need to be confirmed and signed by both parties before they can be put into construction.

The second party shall provide the first party with formal drawings of various equipment for technical certification after the contract is signed. If there are any technical changes during the manufacturing process, they must be confirmed by both parties before they can take effect; The second party shall strictly follow the drawings, rapid documents, and relevant regulations during the manufacturing and construction process, and conduct more comprehensive technical quality supervision and control.

During the manufacturing process of Party B, Party A shall conduct intermediate inspections on the manufacturing quality. Before the equipment leaves the factory, Party A shall conduct a pre acceptance inspection at Party B’s factory.

The equipment provided by Party B must operate normally, be safe and reliable, have a beautiful appearance, and have harmonious color tones;

During the quality assurance period, the supplier provides free warranty for the system. If the purchaser requests maintenance, the manufacturer should respond within 2 hours and provide a solution within 4 hours. If a solution can be quickly resolved, personnel will be dispatched to the site within 24 hours and the repair will be completed within 6 hours; After the warranty period ends, the manufacturer still provides lifelong maintenance, upkeep, modification, system upgrades and other services for the equipment. The material costs, labor costs and other expenses shall be borne by the purchaser after confirmation. For the maintenance needs of the demand side, the manufacturer should still complete them according to the time requirements within the warranty period.

10.2 Quality Requirements and Safety

Each device should run smoothly, without crawling, impact, shaking, leakage or other adverse phenomena. The heating system and ultrasonic system should be safe and reliable, and the exhaust system should be designed and manufactured reasonably;

The design and installation of all electrical appliances, distribution boxes, and their control boxes shall comply with the safety standards of national electrical technology, and all mechanical installations shall meet the accuracy levels required by relevant national regulations.

Water, air, and air connections are not allowed to have any air, air, or water leakage.

The connections of the equipment should be straight, and the metal surface should be sprayed flat, smooth, without paint leakage, and have uniform color.

Equipment, heating devices, or other power equipment should have good overload protection and emergency braking protection devices.

Related important components require size reports, quality reports, inspection reports, etc.

10.3 Technical Services for Training

10.3.1 Technical Services

Free technical support and services are provided for one year from the date of acceptance.

During the trial operation of the equipment, Party B shall be responsible for training the mechanical and electrical maintenance personnel designated by Party A, including equipment operation and maintenance, analysis and handling of common faults.

10.3.2 Training

Serial Number content Participants in the training Start Time time notes
1 Equipment principle and structure training Electrical and mechanical engineers responsible for equipment After the equipment debugging is completed 1 day Provide equipment manuals and training materials
2 Training on equipment operation, emergency response, equipment maintenance, etc Electrical and mechanical engineers responsible for equipment After the equipment debugging is completed 1 day Provide equipment manuals and training materials
3 Equipment principle and structure training Equipment users After the equipment debugging is completed 1 day Provide equipment manuals and training materials

11. Explanatory document

11.1 Equipment Technical Data

System Operation Manual

Electrical control circuit diagram (PLC circuit diagram, electrical wiring diagram).

11.2 Equipment accessories and spare parts

Provide a list of spare parts required for the normal use and maintenance of the equipment;

Provide a list of vulnerable parts.

12. Equipment safety

Equipment operation should be strictly carried out in accordance with the operating instructions, and operation and maintenance personnel should receive specialized training;

The parts that may cause harm to the human body are clearly marked with warning signs on the equipment;

The professional operation section has clear warning signs on the equipment;

There are clear operating steps for special operations.

Plastic ventilation ducts: