1.1 Equipment Overview The main function is to clean quartz tubes with an outer diameter of 290mm and a length of 2500mm Basic parameter table of equipment

Equipment name	Furnace tube cleaning machine
Equipment number	ASSH-QF-241018
quantity	1 unit
Equipment size	3500mm(L)×2500mm(W)×2200mm(H)
Cleaning product size	2500mm (L) X290mm (D)/Single (8-inch furnace tube)
Time setting	0-12 hours can be set (depending on the actual process time)
Equipment form	Indoor placement type
Capacity design	Two shift system (note: working 24H/day, 360 days/year)
Equipment stability	UPTIME: UPTIME ≥ 98% (1- (fault time+PM time)/total time)
	MTTR: MTTR ≤ 4h (MTTR=total repair time/total number of failures)
	MTBE: MTBE ≥ 450h (MTBF=total operating time/total number of failures)
Equipment operating temperature range	20-25°C
relative humidity	＜70%

1.2 Equipment Features

standard	The design, selection, manufacturing, inspection, and testing of this equipment are carried out in accordance with relevant national and semiconductor industry standards (SEMI-S2-93), standardized and guaranteed by the ISO9001 quality management system, except as otherwise specified in the contract or technical documents. The purchased accessories shall comply with the corresponding national standards, industry standards, specifications, and enterprise standards
The equipment includes	Equipment body, electrical control part, chemical process tank, etc; And provide interfaces that are compatible with the factory’s power supply, gas supply, water supply, wastewater discharge, exhaust system, etc
main body	The overall design of the equipment is integrated, and the main body of the equipment is made of German imported SIMONA porcelain white 10mm PP board, which is sturdy, durable, and double-layer leak proof,
Skeleton	SUS304+porcelain white German imported SIMONA PP board combination to prevent rusting of the shell
safety door	Install high transparency PVC upper and lower cylinder safety doors on the equipment, which are divided into two safety doors on the left and right to separate and protect personnel safety; Equipment sealing strip at the edge
surface	The height is about 950mm, and the platform panel is evenly distributed with circular holes of Φ 10mm. The structural design fully considers long-term operation in acid corrosion environment
Process tank	Modular design, with the corrosion tank and pure water flushing tank placed in a unified leak proof chassis. The chassis is processed using full welding technology to eliminate the risk of machine leakage
pipe system	Located at the bottom of the equipment, all process tanks, pipelines, and valve parts are clearly labeled; The medication pipeline uses PILLAR PFA pipes, the pure water pipeline uses GF PVDF pipes, and the chemical corrosion tank waste liquid and flushing wastewater are discharged through dedicated pipelines
electrical protection	The electrical control, gas path control, and process tank control parts are located in separate electrical control cabinets at the rear of the equipment. The electrical components are adequately protected against acid mist corrosion to ensure stable and reliable equipment performance and operation; All electrical and wiring that may come into contact with acid mist are treated with PFA anti-corrosion isolation, and the electrical cabinet CDA/N2 is inflated to protect the electrical control components inside
Work lighting	The acid resistant and alkali resistant LED lighting fixtures above are replaceable at 220V and 40W, with LED lighting parameters ranging from 4000-5500K
Water vapor gun	The front of the machine is equipped with two Parker PP pure water guns and two PP nitrogen air guns, which are placed on both sides. The water guns are designed to drip live water, making it convenient for operators to manually clean the tank or workpiece
Machine support legs	There are pulley devices and fixing devices with anti-corrosion seats, and they have height adjustment and locking functions
security guarantee	Complete alarm and protection design, hardware or software interlocking for exhaust pressure, liquid level, and drainage, intuitive operation interface, clear information prompts, ensuring production, process control, and safety. The three color warning light is placed prominently above the machine

2. Process flow and process details

2.1 Process flow:

1 # Acid Bubble -2 # Acid Bubble -3 # Water Cleaning -4 # Drying

2.2 The table layout is as follows

2.3 Process parameters for each slot:

	production processes	Auxiliary functions	Time (S)	Temperature (℃)	material	Slot cover	convulsions
1	Quartz tube transport vehicle	Loading and unloading transportation	0-9999	RT	NPP	not have	not have
1	acid tank	Soaking, bubbling, rotating	0-9999	RT	PVDF	automatic	have
2	acid tank	Soaking, bubbling, rotating	0-9999	RT	PVDF	automatic	have
3	QDR slot	Spray water injection Overflow bubble rotation	0-9999	RT	NPP	automatic	have
4	Drying tank	Heating, drying, and rotating	0-9999	RT-80°C±3°C	SUS316L	automatic	have

2.4 Quartz Tube Transport Vehicle

Work energy	Loading, unloading, and transportation
Tank material	Imported SIMONA 10mm NPP board from Germany
Tank size	L2600 * W400 * 400mm (effective size)
Transportation method	Manual handling
Connection method	Place sensors with limited positions at both ends, Check whether the transport vehicle is placed in place, with magnetic suction at the rear end to fix the position of the transport vehicle

2.5 Acid tank (1 # 2 #)

medium	HF
Work energy	Soaking, bubbling, rotating
Tank material	Imported SIMONA 10mm PVDF board from Germany
Tank size	L2600 * W400 * 400mm (effective size)
Usage temperature	RT
Bubble method	PFA pipes are evenly distributed at the bottom
Liquid level method	Connecting pipe liquid level
Liquid inlet method	Near end CDS automatic liquid inlet, supply pump adopts diaphragm pump
Fluid replacement method	Near end CDS automatic fluid replenishment
water feeding pattern	Automatic water intake
Hydration method	Automatic water replenishment of pipeline valves
Mutual fighting function	When the cleaning frequency of HF tank 1 # and HF tank 2 # reaches the upper limit and needs to be drained, 1 # HF tank is directly discharged, 2 # HF tank is discharged into 1 # HF tank, and 2 # HF tank is refilled with new solution
Tilt angle	The height difference of the rollers on both sides is 20-30mm, and the quartz tube tilts at a small angle
Rotation method	Drive rotation (rolling) groove device: corrosion-resistant PVDF active/passive shafts (adjustable) are installed on both sides of the groove bottom, and corrosion-resistant (scratch resistant quartz tube outer wall, prevent quartz tube slipping) O-rings are installed on the bearings
rotator	Drive rotation (rolling) device outside the groove: A closed motor drives the acid and alkali resistant gear outside the groove, which drives the driving wheel inside the groove to rotate the quartz tube through a chain made of acid and alkali resistant material, preventing corrosion. The speed is 5-10 revolutions per minute (adjustable)
Drainage method	Gravity discharge to buffer tank
Cache method	There is a cache slot installed at the bottom of the device, and a liquid level sensor is installed in the cache slot The buffer tank liquid is pumped into the working operation through a diaphragm pump
Slot cover	Automatic PVDF tank cover

2.6 QDR slot (3 #)

medium	DIW
Work energy	Spray water injection overflow bubbling rapid discharge rotation
Tank material	Imported SIMONA 10mm NPP board from Germany
Tank size	L2600 * W400 * 400 mm (effective size)
Usage temperature	RT
Bubble method	PFA pipes are evenly distributed at the bottom, and the upper part of the bubble tube is equipped with a perforated plate
Tilt angle	The height difference of the rollers on both sides is 20-30mm, and the quartz tube tilts at a small angle
Rotation method	Drive rotation (rolling) groove device: The bottom of the groove is equipped with corrosion-resistant PVDF stainless steel active/passive shafts (adjustable) on both sides, and the bearings are equipped with corrosion-resistant (scratch resistant quartz tube outer wall, prevent quartz tube slipping) O-rings
rotator	Drive rotation (rolling) device outside the groove: A closed motor drives the acid and alkali resistant gear outside the groove, which drives the driving wheel inside the groove to rotate the quartz tube through a chain made of acid and alkali resistant material, preventing corrosion. The speed is 5-10 revolutions per minute (adjustable)
Liquid inlet method	Automatic water inlet spray water injection
Drainage method	Rapid emission
technological process	Step 1: Spray open the quick release and simultaneously open the rotating opening Step 2: Inject water, turn on the spray, turn on the bubble, turn on the rotation, and open it Step 3: After the water is full, overflow and bubble open to complete the soaking process The time for the above steps is in seconds and can be set. The batch can also be set

2.7 Drying Tank (4 #)

medium	nitrogen
Work energy	Heat and blow dry
Tank material	Imported SUS316L stainless steel with a thickness of 2mm
Tank size	L2600 * W400 * 400 mm (effective size)
Usage temperature	RT-80°C±3°C
Heating method	SUS online heater heating+infrared heating
Temperature control method	PID control method
Over Temperature Protection	Cut off the heating power supply when the set temperature exceeds 5 ° C
Air Intake method	Automatic intake
Blowing method	Blow the outer wall of the quartz tube with nitrogen nozzles on both sides, and blow the inner wall of the quartz tube with nozzles on the end face of the quartz tube
Tilt angle	The height difference of the rollers on both sides is 20-30mm, and the quartz tube tilts at a small angle
Rotation method	Drive rotation (rolling) groove device: corrosion-resistant PVDF active/passive shafts (adjustable) are installed on both sides of the groove bottom, and corrosion-resistant (scratch resistant quartz tube outer wall, prevent quartz tube slipping) O-rings are installed on the bearings
rotator	Drive rotation (rolling) device outside the groove: A closed motor drives the acid and alkali resistant gear outside the groove, which drives the driving wheel inside the groove to rotate the quartz tube through a chain made of acid and alkali resistant material, preventing corrosion. The speed is 5-10 revolutions per minute (adjustable)
Drainage method	gravity discharge
Slot cover	Automatic SUS316L slot cover

3. Lifting robotic arm

3.1. Introduction to Main Functions

Mechanical arm bearing	Capacity	Max.60Kg/time
	Number of furnace tubes	1 piece/time
Function Description	Number of robotic arms	1
	Rotating flower basket device	have
	Flower basket lifting device	have
	Arm material	PVC
	The pneumatic valve is separated from the slot cover cylinder air circuit	not have
	Detection of working liquid level in each tank	have
	motor control	Mitsubishi/Panasonic
	Position protection function	Servo parameter protection+position sensor protection
	Management protection function	Position sensor protection
	Liquid level protection function	have
	Temperature protection function	have
	Leakage detection function	have

4. Electrical components

4.1 Electrical Cabinet Section

Electrical cabinet section	The equipment is equipped with an independent power distribution area, which is equipped with temperature control alarms. The circuit is divided into functional blocks, with strong and weak electricity divided for easy maintenance;
	The equipment is equipped with a ventilation system to ensure air circulation inside the electrical cabinet and has good heat dissipation function;
	All electrical control systems are equipped with leakage protectors, reliable grounding devices, and emergency shutdown and alarm systems;

4.2 Control section

controller	The equipment is divided into automatic and manual parts during use. No other operations are allowed during automatic operation. In case of any problems, please press the emergency stop device. Manual operation during automatic operation is strictly prohibited; Manual operation is strictly prohibited when heating the equipment
	Human computer interface: adopting professional and advanced graphical user interface, easy to operate and master, capable of completing trajectory editing and modification according to needs.
	Basic functions: password verification login, security protection door protection, alarm and other security functions, storage functions such as process prescription, operation and maintenance records, etc
	Warning light, buzzer, emergency stop
	The upper computer adopts Siemens and controls the functions of the host screen: there is a manual operation button for the equipment, and real-time monitoring of the equipment is completed according to the pipeline diagram setting screen. Various functions of each tank are monitored, including temperature, liquid level, tank cover status, mechanical arm in place status, pump and valve start and stop, alarm display, and alarm recording.
	Interface settings: various parameter settings, interfaces for management personnel, process personnel, operators, etc.
	All chemical tanks are equipped with capacitive level sensors to prevent pump idling. Capacitive level gauges are added to the heating tanks to prevent dry burning of the heaters;
	The equipment has an automatic alarm information recording system
	When shielded separately, manual operation is possible
	Tank temperature control can set compensation values
	The device has an interface that can implement MES and open permissions, with an OPC protocol Ethernet port.
	Provide PLC addresses for key process parameters of equipment, including input, output, replenishment records, power settings, replenishment calibration, position calibration, and speed, for MES systems or big data platforms to collect and develop
	Equipment computer host or industrial control computer equipped with UPS power supply

5. Equipment utility engineering conditions

5.1 Electric Power Conditions

voltage	380V
frequency	50Hz
Number of phases	Three-phase five-wire system
power	12KW
loop	DC24V

5.2 Gas dynamic conditions of liquid medicine

medium	temperature	material	Pressure kgf/cm2	internet traffic	caliber	Connection method
liquid
pure water	RT	PVDF	≤0.2MPA	≤20L/min	DN40	slipknot
gas
CDA	RT	PFA tube	≤0.6MPA	≤10L/min	3/8”	Direct insertion
N2	RT	PFA tube	≤0.5MPA	≤100L/min	1/2”	Direct insertion
emission
waste water	RT	PP	—	—	DN40*2	slipknot
waste acid	RT	PFA tube	—	—	1”*2	—
Exhaust emissions
Acid/alkaline gas	RT	PP	≥150pa	≥2400M3/h	Φ200*4	flange

Main Material List for Equipment

Serial Number	product	material	brand
1	board	Porcelain white PP	SIMONA
2	board	Transparent PVC	SIMONA
3	board	PVDF	SIMONA
4	board	PTFE	SIMONA
5	Pneumatic diaphragm valve	PFA	Entergris
6	PVDF manual ball valve	PVDF	GF
7	Pneumatic diaphragm pump	PFA	TRBOR
8	Airbag pump	PTFE	IWAKI
9	pressure reducing valve	Core SUS316L stainless steel	SMC
10	Electromagnetic valve+valve guide		SMC
11	joint	PFA	GEMU
12	piping	PFA	PILLAR
13	piping	CL-PVC	accumulated water
14	inline heater	SUS316L stainless steel	Heateflex
15	filter	PFA	entegris
16	photoelectric sensor		KEYENCE
17	Electromagnetic valve+valve guide		SMC
18	Proximity sensor	PTFE	KEYENCE
19	Pressure sensor		SMC
20	Temperature control table		Siemens
21	control host		SIEMENS
22	PLC		BECKHOFF
23	servo motor		Siemens

7. Manufacturing cycle

Three months after the advance payment of the effective subject matter of the contract is received;

8. Equipment delivery inspection and transportation

8.1 Acceptance standards and acceptance criteria

Table 8-1 Acceptance Specifications

Serial Number	project subject to check and delivery	Testing parameters or requirements	test method	notes
1	appearance	Clean surface and clear labeling	visualization
2	External dimensions	According to the contract requirements	taping
3	Tank size	According to the contract requirements	taping
4	maximum temperature	According to the contract requirements	Using a thermometer for measurement
5	minimum temperature	According to the contract requirements	Using a thermometer for measurement
6	precision	According to the contract requirements	Using a thermometer for measurement
7	control mode	visualization	visualization
8	power supply		Embedded flow table
9	power		Embedded flow table
10	Security testing	1500V communication, no breakdown for 1 minute	According to GB4793.1-1999 Test according to the voltage withstand tester	pressure resistance
		After stabilizing at 500V DC for 10 seconds, the insulation resistance value should be above 2M ohms	Insulation resistance tester testing

Table 8-2 Acceptance Criteria

Serial Number	Testing items	describe
1	appearance	The product shell has no obvious deformation, cracks, bending or other serious damage, and the fastening parts are not loose, firm and reliable. If one of them is unqualified, it is allowed not to be accepted
2	performance index	Meet design and specification requirements
3	other	Execute according to the contents listed in this Technical Agreement

9. Equipment installation and debugging

9.1 Installation, Installation, and Debugging

After the equipment is accepted by Party B and notified to Party A, the job responsibilities of all parties are defined as follows

Job Responsibilities of Party B

Equipment unboxing;

Install the equipment in place according to the requirements of the factory layout plan;

Assembly and installation of equipment;

Under the guarantee conditions provided by Party A, Party B shall complete the installation according to the schedule to ensure quality;

Equipment debugging and acceptance work

The first party is responsible for the following tasks

Place the power supply and standard air source in the installation position of the equipment and connect them;

The second party shall provide necessary assistance to the first party during the installation, debugging, and acceptance process

Complete positioning of the machine within 24 hours upon arrival; Complete secondary configuration within one week

9.2 Equipment acceptance

According to the quality assurance system, this acceptance standard is specially formulated as the basis for inspecting and accepting the equipment (including all contents of the contract) undertaken by Party B.

Design control: Based on the production outline proposed by Party A, Party B shall make reasonable designs in accordance with industry standards, and continuously optimize the scheme design during the communication process with Party A. For the structure of the equipment’s wiring, transmission, power, temperature control and other parts, a margin must be left in the selection to ensure long-term safe, reliable and stable operation, providing the most basic conditions for Party A to ensure product quality.

Manufacturing process control: During the production of equipment by Party B, strict inspections and experiments should be conducted, and any non-conforming products should not be allowed to proceed to the next process.

Inspection and acceptance: During the equipment manufacturing process and after the formation of finished components, strict inspection and testing must be carried out, and unqualified products are not allowed to enter the next process;

Handling, storage, packaging, protection, and delivery: Party B shall take measures to ensure product quality, and this protection shall continue until the delivery destination is installed, debugged, and delivered to Party A for use;

Installation and commissioning: Party B shall install and commission the equipment in accordance with industry regulations. Under the guarantee conditions provided by Party A, Party B shall complete the installation and commissioning work according to the schedule to ensure quality.

Personnel training: During the trial production process, Party B is responsible for providing training to Party A’s engineering and technical personnel on production line operation, maintenance, upkeep, and repair, as well as providing standardized training materials, circuit diagrams, and a complete list of spare parts.

9.3 Final acceptance

Acceptance of the appearance of the system: This equipment is a brand new and complete production device that meets the specifications specified in the signed contract.

Equipment stability acceptance: Uptime ≥ 98%.

The equipment has been confirmed to meet production requirements and has been running continuously for one month. During this period, the equipment has no abnormalities and meets the technical specifications. The acceptance process will be followed.

10. Service Guarantee

10.1 Equipment Quality Assurance

The second party shall provide a one-year warranty for the equipment after the start of debugging. Aisen Shihua Company shall be responsible for the on-site installation of the system and provide free technical support and services for one year from the date of acceptance;

The second party guarantees that the quality, specifications, brand, and place of origin of all materials and components shall comply with the contract

The process layout, equipment arrangement, general assembly drawing, and technical documents need to be confirmed and signed by both parties before they can be put into construction.

The second party shall provide the first party with formal drawings of various equipment for technical certification after the contract is signed. If there are any technical changes during the manufacturing process, they must be confirmed by both parties before they can take effect; The second party shall strictly follow the drawings, rapid documents, and relevant regulations during the manufacturing and construction process, and conduct more comprehensive technical quality supervision and control.

During the manufacturing process of Party B, Party A shall conduct intermediate inspections on the manufacturing quality. Before the equipment leaves the factory, Party A shall conduct a pre acceptance inspection at Party B’s factory.

The equipment provided by Party B must operate normally, be safe and reliable, have a beautiful appearance, and have harmonious color tones;

During the quality assurance period, the supplier provides free warranty for the system. If the purchaser requests maintenance, the manufacturer should respond within 2 hours and provide a solution within 4 hours. If a solution can be quickly resolved, personnel will be dispatched to the site within 24 hours and the repair will be completed within 6 hours; After the warranty period ends, the manufacturer still provides lifelong maintenance, upkeep, modification, system upgrades and other services for the equipment. The material costs, labor costs and other expenses shall be borne by the purchaser after confirmation. For the maintenance needs of the demand side, the manufacturer should still complete them according to the time requirements within the warranty period.

10.2 Quality Requirements and Safety

Each device should run smoothly, without crawling, impact, shaking, leakage or other adverse phenomena. The heating system and ultrasonic system should be safe and reliable, and the exhaust system should be designed and manufactured reasonably;

The design and installation of all electrical appliances, distribution boxes, and their control boxes shall comply with the safety standards of national electrical technology, and all mechanical installations shall meet the accuracy levels required by relevant national regulations.

Water, air, and air connections are not allowed to have any air, air, or water leakage.

The connections of the equipment should be straight, and the metal surface should be sprayed flat, smooth, without paint leakage, and have uniform color.

Equipment, heating devices, or other power equipment should have good overload protection and emergency braking protection devices.

Related important components require size reports, quality reports, inspection reports, etc.

10.3 Technical Services for Training

10.3.1 Technical Services

Free technical support and services are provided for one year from the date of acceptance.

During the trial operation of the equipment, Party B shall be responsible for training the mechanical and electrical maintenance personnel designated by Party A, including equipment operation and maintenance, analysis and handling of common faults.

10.3.2 Training

Serial Number	content	Participants in the training	Start Time	time	notes
1	Equipment principle and structure training	Electrical and mechanical engineers responsible for equipment	After the equipment debugging is completed	1 day	Provide equipment manuals and training materials
2	Training on equipment operation, emergency response, equipment maintenance, etc	Electrical and mechanical engineers responsible for equipment	After the equipment debugging is completed	1 day	Provide equipment manuals and training materials
3	Equipment principle and structure training	Equipment users	After the equipment debugging is completed	1 day	Provide equipment manuals and training materials

11. Explanatory documents

11.1 Equipment Technical Data

System Operation Manual

Electrical control circuit diagram (PLC circuit diagram, electrical wiring diagram).

11.2 Equipment accessories and spare parts

Provide a list of spare parts required for the normal use and maintenance of the equipment;

Provide a list of vulnerable parts.

12. Equipment safety

Equipment operation should be strictly carried out in accordance with the operating instructions, and operation and maintenance personnel should receive specialized training;

The parts that may cause harm to the human body are clearly marked with warning signs on the equipment;

The professional operation section has clear warning signs on the equipment;

There are clear operating steps for special operations.