Processing power
Satisfy wafer sizes of 2 inches, 4 inches, 6 inches, 8 inches, 12 inches, and different board sizes;
Tank size: The tank size meets the electroplating requirements of 12 inch pieces and is compatible downwards.
Equipment purpose
The equipment is capable of meeting the requirements for packaging substrates and wafer level packaging.
The equipment is suitable for corrosion-resistant structures: both the equipment body and the tank are made of acrylic, which can be used in corrosive environments as a whole;
The equipment is equipped with a frequency converter control, and the page displays a Chinese interface, which can be upgraded for free.
Composition of Electroplating System
| No. | Name | Model | Unit | Quantity（Set） | Remark |
| 1 | Loading and unloading area | The specific model shall be written according to the signed contract | SET | 1 | The parts related to the normal use of the device can be customized or improved according to user needs |
| 2 | Jitter unit | 1 | |||
| 3 | Electroplating unit | 1 | |||
| 4 | Loop unit | 1 | |||
| 5 | Bubble unit | 1 | |||
| 6 | Inflating unit | 1 | |||
| 7 | Temperature Control System | 1 | |||
| 8 | Customized electroplating fixtures | / |
Main technical indicators
| No. | Model | Description |
| 1 | Sealing of equipment | Internal Thousand Level |
| 2 | Working mode | Automatic process operation, dry in and dry out |
| 3 | Liquid preparation method | Manual liquid preparation |
| 4 | Tank body heat-resistant temperature | 0-80° |
| 5 | Discharge of medicinal solution | Recycling/Direct Discharge |
| 6 | Process Time | 0-999min adjustable |
| 7 | Circulating pump flow rate | ≥4.8Lmin adjustable |
| 8 | Shake speed | 0-130rpm adjustable |
| 9 | Process temperature | ±1℃ |
| 10 | 2-inch/4-inch/6-inch electroplating uniformity | On-chip≤±5%，Inter-slice≤±5% |
| 11 | 12 inch electroplating uniformity | On-chip≤±10%，Inter-slice≤±10% |
Equipment construction
Structure and dimensions of electroplating unit tank body
Electroplating tank body: 12L (customizable)
Tank material: Acrylic
Hanging tool material: PVC
Equipment consumables include: sealing rings, hangers
Leak proof liquid
Leak proof: A leak proof plate is installed below the equipment pipeline area, and another leak proof plate is installed outside the entire equipment. The drainage port is installed according to the actual situation on site.