CDU (chemical dispense unit) description

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Chemical Needed pressure at tool, Bar Flow up to,

L/min

Connection
H2SO4 96% 2-3 40 FluoroLine® Plus Dual Containment Tubing

Inner tube: 40 mm

Outer tube: 50,84 mm

TMAH 3% 2-3 40
TMAH 25% 2-3 40
H2O2 30% 2-3 40
NH4OH 2-3 40

- Each reagent is located in a section with a separate door and control panel.

-  Each section should provide for the installation of a 200L barrel and should include:

- A pump for feeding the reagent to consumers

- Filtration unit on the supply line 0.03 µm

- Roller system for installing barrels

- A system for monitoring leaks and pump drainage

- Drainage system

- A tray for collecting leaks

- A liquid level control sensor

- Light signaling

- Nitrogen supply for purging

- PLC controller with display and touch screen

- Pump pulsation damper (separately on the line or as part of the pump)

- Degasser for removing air/nitrogen from the discharge line

- Chemical reagent sampling points

- Reagents should not come into contact with metals

- Connections for liquid particle counter

Plastic ventilation ducts: