E-mail: vicent.xia@wafera.com

CDU (chemical dispense unit) description

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Chemical Needed pressure at tool, Bar Flow up to,

L/min

Connection
H2SO4 96% 2-3 40 FluoroLine® Plus Dual Containment Tubing

Inner tube: 40 mm

Outer tube: 50,84 mm

TMAH 3% 2-3 40
TMAH 25% 2-3 40
H2O2 30% 2-3 40
NH4OH 2-3 40

– Each reagent is located in a section with a separate door and control panel.

–  Each section should provide for the installation of a 200L barrel and should include:

– A pump for feeding the reagent to consumers

– Filtration unit on the supply line 0.03 µm

– Roller system for installing barrels

– A system for monitoring leaks and pump drainage

– Drainage system

– A tray for collecting leaks

– A liquid level control sensor

– Light signaling

– Nitrogen supply for purging

– PLC controller with display and touch screen

– Pump pulsation damper (separately on the line or as part of the pump)

– Degasser for removing air/nitrogen from the discharge line

– Chemical reagent sampling points

– Reagents should not come into contact with metals

– Connections for liquid particle counter

Plastic ventilation ducts: