| Chemical | Needed pressure at tool, Bar | Flow up to,
L/min |
Connection |
| H2SO4 96% | 2-3 | 40 | FluoroLine® Plus Dual Containment Tubing
Inner tube: 40 mm Outer tube: 50,84 mm |
| TMAH 3% | 2-3 | 40 | |
| TMAH 25% | 2-3 | 40 | |
| H2O2 30% | 2-3 | 40 | |
| NH4OH | 2-3 | 40 |
– Each reagent is located in a section with a separate door and control panel.
– Each section should provide for the installation of a 200L barrel and should include:
– A pump for feeding the reagent to consumers
– Filtration unit on the supply line 0.03 µm
– Roller system for installing barrels
– A system for monitoring leaks and pump drainage
– Drainage system
– A tray for collecting leaks
– A liquid level control sensor
– Light signaling
– Nitrogen supply for purging
– PLC controller with display and touch screen
– Pump pulsation damper (separately on the line or as part of the pump)
– Degasser for removing air/nitrogen from the discharge line
– Chemical reagent sampling points
– Reagents should not come into contact with metals
– Connections for liquid particle counter